Title :
Cleanroom Utilities Overview: University of Louisville
Author_Institution :
Center for Micro/Nanotechnol., Univ. of Louisville, Louisville, KY
Abstract :
Details about four major utilities that support the University of Louisville´s new Micro/NanoTechnology Cleanroom are presented. This includes a 3000 gal. deionized water system capable of delivering 18.1 Mohm-cm water at a rate of 75 gal./min., a 6,000 gal. liquid nitrogen system for delivering high purity nitrogen gas, an acid waste neutralizing system for automatically adjusting pH of cleanroom effluent, and a toxic gas monitoring system capable of monitoring over 60 satellite gas sensors.
Keywords :
clean rooms; environmental factors; monitoring; nanotechnology; nitrogen; N; acid waste neutralizing system; cleanroom effluent; cleanroom utilities; deionized water system; liquid nitrogen system; microtechnology cleanroom; nanotechnology cleanroom; nitrogen gas; toxic gas monitoring system; Buildings; Computerized monitoring; Effluents; Filters; Infrared sensors; Nanotechnology; Nitrogen; Remote monitoring; Sensor phenomena and characterization; Steel;
Conference_Titel :
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location :
Louisville, KY
Print_ISBN :
978-1-4244-2484-9
Electronic_ISBN :
978-1-4244-2485-6
DOI :
10.1109/UGIM.2008.56
