Title :
Characterisation of an RF excited argon plasma cathode electron beam gun
Author :
del Pozo, Sofia ; Ribton, Colin ; Smith, David R.
Author_Institution :
Electron Beam Processes, TWI Ltd., Cambridge, UK
fDate :
June 30 2014-July 4 2014
Abstract :
This work describes the experimental set up used for carrying out spectroscopic measurements in a plasma cathode electron beam (EB) gun. Advantages of plasma cathode guns over thermionic guns are described. The factors affecting electron beam power such as plasma pressure, excitation power and plasma chamber geometry are discussed. The maximum beam current extracted was 53 mA from a 0.5 mm diameter aperture in the plasma chamber. In this work, the electron source is an argon plasma excited at 84 MHz. The pressure in the plasma chamber was measured to be within 0.9 to 1.2 mbar and was controlled by varying gas flow rates. The vacuum chamber was at a pressure of 10-5 mbar.
Keywords :
argon; plasma diagnostics; plasma guns; plasma pressure; plasma sources; plasma transport processes; Ar; RF excited argon plasma cathode electron beam gun; beam current; electron beam power; electron source; excitation power; frequency 84 MHz; gas flow rates; plasma chamber geometry; plasma pressure; pressure 0.00010 mbar; pressure 0.9 mbar to 1.2 mbar; spectroscopic measurements; thermionic guns; Argon; Cathodes; Electron beams; Plasma measurements; Plasmas; Stimulated emission;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
DOI :
10.1109/IVESC.2014.6892062