Title :
A parametric model of low-loss RF MEMS capacitive switches
Author :
Qian, J.Y. ; Li, G.P. ; De Flaviis, F.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Irvine, CA, USA
Abstract :
This paper is focused on the creation of an efficient electromagnetic model of MEMS switches which operates at microwave frequencies. The switches are first characterized using a full wave analysis based on a finite element method to extract the S-parameters of the switches for different geometrical dimensions. From the S-parameter database, a scalable lumped circuit model is extracted to allow easy implementation of the switch model into commercial microwave CAD software. The lumped circuit model results are compared with published measured data as validation of our model
Keywords :
S-parameters; finite element analysis; micromechanical devices; microwave switches; S-parameters; electromagnetic model; finite element method; full-wave analysis; low-loss RF MEMS capacitive switch; lumped circuit model; microwave CAD software; parameter extraction; parametric model; Data mining; Electromagnetic modeling; Finite element methods; Microswitches; Microwave frequencies; Parametric statistics; Radiofrequency microelectromechanical systems; Scattering parameters; Spatial databases; Switches;
Conference_Titel :
Microwave Conference, 2001. APMC 2001. 2001 Asia-Pacific
Conference_Location :
Taipei
Print_ISBN :
0-7803-7138-0
DOI :
10.1109/APMC.2001.985291
