A Wireless Microsystem for MEMS Capacitive Sensor Using Bluetooth

Author

Getpreecharsawas, Jirachai ; Fuller, Lynn

Author_Institution

Dept. of Microelectron. Eng., Rochester Inst. of Technol., Rochester, NY

fYear

2008

fDate

13-16 July 2008

Firstpage

223

Lastpage

226

Abstract

In this paper, the design of a microsystem for MEMS capacitive sensor with integrated data converter circuits and wireless monitoring capability has been presented. The data converter circuits operate with dual functionalities - capacitive readout and analog-to-digital (A/D) conversion without the use of a conventional A/D converter. The wireless capability is attained by taking the advantage of a secured and ubiquitous Bluetooth standard. Based on this work, an off-chip Bluetooth transceiver is utilized.

Keywords

Bluetooth; capacitive sensors; micromechanical devices; microsensors; MEMS capacitive sensor; analog-to-digital conversion; capacitive readout; data converter circuits; off-chip Bluetooth transceiver; wireless microsystem; wireless monitoring; Analog-digital conversion; Bluetooth; Capacitive sensors; Communication system security; Data conversion; Frequency conversion; Micromechanical devices; Oscillators; Trigger circuits; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial

Conference_Location

Louisville, KY

Print_ISBN

978-1-4244-2484-9

Electronic_ISBN

978-1-4244-2485-6

Type

conf

DOI

10.1109/UGIM.2008.66

Filename

4573244