Title :
A Wireless Microsystem for MEMS Capacitive Sensor Using Bluetooth
Author :
Getpreecharsawas, Jirachai ; Fuller, Lynn
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., Rochester, NY
Abstract :
In this paper, the design of a microsystem for MEMS capacitive sensor with integrated data converter circuits and wireless monitoring capability has been presented. The data converter circuits operate with dual functionalities - capacitive readout and analog-to-digital (A/D) conversion without the use of a conventional A/D converter. The wireless capability is attained by taking the advantage of a secured and ubiquitous Bluetooth standard. Based on this work, an off-chip Bluetooth transceiver is utilized.
Keywords :
Bluetooth; capacitive sensors; micromechanical devices; microsensors; MEMS capacitive sensor; analog-to-digital conversion; capacitive readout; data converter circuits; off-chip Bluetooth transceiver; wireless microsystem; wireless monitoring; Analog-digital conversion; Bluetooth; Capacitive sensors; Communication system security; Data conversion; Frequency conversion; Micromechanical devices; Oscillators; Trigger circuits; Wireless sensor networks;
Conference_Titel :
University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial
Conference_Location :
Louisville, KY
Print_ISBN :
978-1-4244-2484-9
Electronic_ISBN :
978-1-4244-2485-6
DOI :
10.1109/UGIM.2008.66
