Title :
Multiple-objective real-time scheduler for semiconductor wafer fab using Colored Timed Object-oriented Petri nets (CTOPN)
Author :
Liu, Huiran ; Jiang, Zhibin ; Lee, Yen-Fei ; Fung, Richard Y K
Author_Institution :
Dept. of Ind. Eng. & Manage., Shanghai Jiao Tong Univ., China
Abstract :
This paper presents a multiple-objective real-time scheduler for semiconductor wafer fab using Colored Timed Object-oriented Petri net (CTOPN). First, a high-fidelity hierarchical CTOPN model of wafer fab is constructed, upon which a hierarchical control system is also formed. To rank WIP lots in meeting multiple scheduling objectives, a combined priority index is then developed in the fab level controller. To cope with unpredictable events occurred on the equipments, such as breakdown, real-time dispatching policies are encapsulated in the work station-level controllers, which dynamically dispatch wafer lot, and the dispatching results are fed back to fab controller through work area controllers.
Keywords :
Petri nets; dispatching; hierarchical systems; real-time systems; semiconductor device manufacture; semiconductor process modelling; colored timed object oriented Petri nets; fab level controller; hierarchical control system; multiple objective scheduling; priority index; real time dispatching; semiconductor wafer fab; work in processes lots; Control systems; Dispatching; Job shop scheduling; Modems; Object oriented modeling; Petri nets; Real time systems; Scheduling algorithm; Semiconductor device manufacture; Semiconductor device modeling;
Conference_Titel :
Systems, Man and Cybernetics, 2003. IEEE International Conference on
Print_ISBN :
0-7803-7952-7
DOI :
10.1109/ICSMC.2003.1243866