Title :
Apparatus for studying the three-dimensional structure of thin films by electron holography
Author :
Trofimov, Vasily V. ; Karpov, A.G. ; Antonov, Stepan R.
Author_Institution :
St.-Peterburg State Univ., St. Petersburg, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
Electron holographic apparatus is intended to obtain and analyze three-dimensional structure of organic and inorganic films, fibers and macromolecules with thickness up to 10 nm. The main units of the apparatus is a compact ultrahigh-vacuum chamber, the sample positioning system, a point coherent source of electrons and system of registration and processing of holographic images. Apparatus control and processing of holographic images using a computer system, for which we developed the appropriate software.
Keywords :
electron holography; macromolecules; nanostructured materials; thin films; compact ultrahigh-vacuum chamber; computer system; electron holographic apparatus; electron holography; fibers; holographic image processing; holographic image registration; inorganic films; macromolecules; organic films; point coherent electron source; sample positioning system; software; thin films; three-dimensional structure; Atomic layer deposition; Cathodes; Electron beams; Electron microscopy; Interference; Metals;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
DOI :
10.1109/IVESC.2014.6892091
