Title :
Effect of titanium content on the impedance characteristics of high-Κ TbTxOy electrolyte-insulator-semiconductor pH sensors
Author :
Chih-Wei Wang ; Tung-Ming Pan ; Fu-Chien Chiu ; Lifeng Chi
Author_Institution :
Chang Gung Univ., Taoyuan, Taiwan
fDate :
June 30 2014-July 4 2014
Abstract :
The effect of titanium content on the impedance characteristics of TbTixOy EIS sensors was investigated by means of C-V method. The bulk resistance increases with increasing pH value of a solution. Finally, the TbTixOy EIS device measured at the inversion regime exhibited higher impedance as compared to the accumulation and depletion regimes.
Keywords :
chemical sensors; electric impedance measurement; electric resistance measurement; electrolytes; pH measurement; semiconductor-insulator boundaries; terbium compounds; C-V method; EIS device measurement; EIS sensor; TbTixOy; bulk resistance; depletion regime; high-κ electrolyte-insulator-semiconductor pH sensor; impedance characteristics; inversion regime; titanium content effect; Impedance; Impedance measurement; Resistance; Semiconductor device measurement; Sensor phenomena and characterization; Titanium;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2014 Tenth International
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-5770-5
DOI :
10.1109/IVESC.2014.6892099
