Title :
Fabrication of Bi4Ti3O12 Thin Films Using Alcohol Related Solutions by Micro Liquid Delivery Systems
Author :
Yamaguchi, Masaki ; Yamamoto, Asa ; Masuda, Yoichiro
Author_Institution :
Shibaura Inst. of Technol., Tokyo
Abstract :
We fabricate the bismut titanate (Bi4Ti3O12) thin films used an alcohol related solutions which dissolved Bi(OtC5H11)3 and Ti[OCH(CH3)2]4 in C2H5OC2H4OH for micro liquid delivery systems such as ink-jet printing method. These films fired at 750 degree Celsius into pure oxygen including 1.2% ozone atmosphere, exhibits plate-like grains, and highly c-axis oriented. Furthermore, its films shows good ferroelectric properties, remanent polarization and coercive field was 2.6 muC/cm2 and 36 kV/cm, respectively, and shows fatigue properties up to 108 times. Additionally, we examined the pattern formation on Pt substrate with hydrophilic treatment by micro liquid delivery systems. Drawn patterns on hydrophilic treated substrate surface shows relatively flat cross sectional structures. Therefore, we think that the micro liquid delivery system and hydrophile treatment of substrate surface is effectively to the thin film formation.
Keywords :
bismuth compounds; dielectric polarisation; ferroelectric thin films; liquid phase deposition; pattern formation; Bi4Ti3O12; alcohol related solutions; bismuth titanate; coercive field; fatigue; ferroelectric properties; ink-jet printing; micro liquid delivery systems; pattern formation; remanent polarization; temperature 750 degC; thin films; Atmosphere; Bismuth; Fabrication; Ferroelectric films; Ferroelectric materials; Ink jet printing; Substrates; Surface treatment; Titanium compounds; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393190
