Title :
Miniaturized spectrometer technologies
Author_Institution :
Photonic Devices & Meas. Solutions, VTT Tech. Res. Centre of Finland, Espoo, Finland
Abstract :
VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 μm and to enlarge apertures of devices for increased throughput. This paper reviews VTT´s surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation.
Keywords :
Fabry-Perot interferometers; infrared spectrometers; micro-optics; micromachining; ultraviolet spectrometers; Fabry-Perot interferometer; MEMS; miniaturized spectrometer; surface micromachining; Detectors; Micromechanical devices; Mirrors; Optical device fabrication; Optical films; Optical filters; Optical imaging;
Conference_Titel :
Information Optics (WIO), 2010 9th Euro-American Workshop on
Conference_Location :
Helsinki
Print_ISBN :
978-1-4244-8226-9
Electronic_ISBN :
978-1-4244-8227-6
DOI :
10.1109/WIO.2010.5582486
