Title :
Liquid crystal spatial light modulators in optical metrology
Author :
Falldorf, Claas ; Von Kopylow, Christoph ; Bergmann, Ralf B.
Author_Institution :
BIAS - Bremer Inst. fur Angewandte Strahltechnik GmbH, Bremen, Germany
Abstract :
We provide an overview over recent applications of electronically addressed liquid crystal spatial light modulators (SLM) in the field of optical metrology. Three particular examples are considered: A shear interferometer, a setup for phase retrieval from a set of intensity measurements and a digital holographic sensor which allows for the electronic adaption of the reference wave.
Keywords :
holographic optical elements; image retrieval; image sensors; light interferometers; liquid crystal devices; reviews; spatial light modulators; digital holographic sensor; electronically adressed liquid crystal spatial light modulators; optical metrology; phase retrieval; shear interferometer; Holographic optical components; Holography; Optical interferometry; Optical modulation; Optical sensors; Optimized production technology;
Conference_Titel :
Information Optics (WIO), 2010 9th Euro-American Workshop on
Conference_Location :
Helsinki
Print_ISBN :
978-1-4244-8226-9
Electronic_ISBN :
978-1-4244-8227-6
DOI :
10.1109/WIO.2010.5582527
