Generation of 0.336-J, 10-Hz, 266-nm pulses from Nd:YAG laser using large Li/sub 2/B/sub 4/O/sub 7/ nonlinear crystals

Author

Suzuki, Y. ; Ono, S. ; Murakami, H. ; Kozeki, T. ; Ohtake, H. ; Sarukura, N. ; Masada, G. ; Shiraishi, H. ; Sekine, I.

Author_Institution

Inst. for Molecular Sci., Okazaki, Japan

fYear

2002

fDate

24-24 May 2002

Firstpage

644

Abstract

Summary form only given. We have confirmed the long-term stability of the fourth harmonic generation of a Nd:YAG laser by use of Li/sub 2/B/sub 4/O/sub 7/ crystals with a cascade scheme. We report 336-mJ, 266-nm pulse generation from a 10-Hz, Q-switched Nd:YAG laser with a total conversion efficiency of 23%, and the long-term stability of over 5 hour. This performance is sufficiently good for the pump source of the TW-class UV femtosecond laser system. Additionally this high pulse energy UV laser is attractive for the substitution of the most of industrial KrF excimer lasers used for annealing applications.

Keywords

lithium compounds; optical harmonic generation; optical materials; optical pulse generation; optical pumping; solid lasers; 10-Hz Q-switched Nd:YAG laser; 23 percent; 266 nm; 336 mJ; 5 h; Li/sub 2/B/sub 4/O/sub 7/; TW-class UV femtosecond laser system; YAG:Nd; YAl5O12:Nd; annealing applications; cascade scheme; fourth harmonic generation; high pulse energy UV laser; large Li/sub 2/B/sub 4/O/sub 7/ nonlinear crystals; long-term stability; pump source; total conversion efficiency; Application software; Cameras; Image analysis; Microscopy; Nonlinear distortion; Optical pulse generation; Periodic structures; Photonic crystals; Size control; Space vector pulse width modulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2002. CLEO '02. Technical Digest. Summaries of Papers Presented at the

Conference_Location

Long Beach, CA, USA

Print_ISBN

1-55752-706-7

Type

conf

DOI

10.1109/CLEO.2002.1034429

Filename

1034429