DocumentCode :
2276738
Title :
IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes
Author :
Almeida, Nuno ; Pires, João ; Sora, David
Author_Institution :
Critical Manuf., Maia, Portugal
fYear :
2012
fDate :
15-17 May 2012
Firstpage :
170
Lastpage :
174
Abstract :
IMPROVE is a European project aiming to research and develop methods and tools to increase the efficiency of semiconductor production processes. Within project activities three simulation applications with disparate technical characteristics, using different technologies, were developed. Critical Manufacturing accepted the challenge of developing a tool capable of connecting these simulation modules, execute them as a continuous process and save the results for further analysis.
Keywords :
semiconductor device manufacture; European project; IMPROVE simulation tool; semiconductor manufacturing processes; semiconductor production processes; Computational modeling; Computer architecture; Connectors; Europe; Graphical user interfaces; Java; Servers; Client/Server; GUI; IMPROVE; Semiconductors; Simulation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
Conference_Location :
Saratoga Springs, NY
ISSN :
1078-8743
Print_ISBN :
978-1-4673-0350-7
Type :
conf
DOI :
10.1109/ASMC.2012.6212904
Filename :
6212904
Link To Document :
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