Title :
IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes
Author :
Almeida, Nuno ; Pires, João ; Sora, David
Author_Institution :
Critical Manuf., Maia, Portugal
Abstract :
IMPROVE is a European project aiming to research and develop methods and tools to increase the efficiency of semiconductor production processes. Within project activities three simulation applications with disparate technical characteristics, using different technologies, were developed. Critical Manufacturing accepted the challenge of developing a tool capable of connecting these simulation modules, execute them as a continuous process and save the results for further analysis.
Keywords :
semiconductor device manufacture; European project; IMPROVE simulation tool; semiconductor manufacturing processes; semiconductor production processes; Computational modeling; Computer architecture; Connectors; Europe; Graphical user interfaces; Java; Servers; Client/Server; GUI; IMPROVE; Semiconductors; Simulation;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-4673-0350-7
DOI :
10.1109/ASMC.2012.6212904