DocumentCode
2276738
Title
IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes
Author
Almeida, Nuno ; Pires, João ; Sora, David
Author_Institution
Critical Manuf., Maia, Portugal
fYear
2012
fDate
15-17 May 2012
Firstpage
170
Lastpage
174
Abstract
IMPROVE is a European project aiming to research and develop methods and tools to increase the efficiency of semiconductor production processes. Within project activities three simulation applications with disparate technical characteristics, using different technologies, were developed. Critical Manufacturing accepted the challenge of developing a tool capable of connecting these simulation modules, execute them as a continuous process and save the results for further analysis.
Keywords
semiconductor device manufacture; European project; IMPROVE simulation tool; semiconductor manufacturing processes; semiconductor production processes; Computational modeling; Computer architecture; Connectors; Europe; Graphical user interfaces; Java; Servers; Client/Server; GUI; IMPROVE; Semiconductors; Simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
Conference_Location
Saratoga Springs, NY
ISSN
1078-8743
Print_ISBN
978-1-4673-0350-7
Type
conf
DOI
10.1109/ASMC.2012.6212904
Filename
6212904
Link To Document