• DocumentCode
    2276738
  • Title

    IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes

  • Author

    Almeida, Nuno ; Pires, João ; Sora, David

  • Author_Institution
    Critical Manuf., Maia, Portugal
  • fYear
    2012
  • fDate
    15-17 May 2012
  • Firstpage
    170
  • Lastpage
    174
  • Abstract
    IMPROVE is a European project aiming to research and develop methods and tools to increase the efficiency of semiconductor production processes. Within project activities three simulation applications with disparate technical characteristics, using different technologies, were developed. Critical Manufacturing accepted the challenge of developing a tool capable of connecting these simulation modules, execute them as a continuous process and save the results for further analysis.
  • Keywords
    semiconductor device manufacture; European project; IMPROVE simulation tool; semiconductor manufacturing processes; semiconductor production processes; Computational modeling; Computer architecture; Connectors; Europe; Graphical user interfaces; Java; Servers; Client/Server; GUI; IMPROVE; Semiconductors; Simulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
  • Conference_Location
    Saratoga Springs, NY
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4673-0350-7
  • Type

    conf

  • DOI
    10.1109/ASMC.2012.6212904
  • Filename
    6212904