On-wafer large signal power, S-parameter and waveform measurement system

An on-wafer measurement system has been developed for the complete characterization of the large signal behavior of transistors up to 40 GHz based on the microwave transition analyzer HP 71500A. The vector measurement capability of the MTA is utilized to allow full vector calibration of the measurement system for the fundamental and the higher harmonics. The error corrected waveforms at the transistor terminals are derived from the measurement data. Novel analysis concepts have been developed for the extraction of transistor characteristics and parameters from large signal RF measurements, i.e., RF current and voltage constraints associated with the output characteristic and the RF large signal transfer characteristic. These parameters, measured under real RF operating conditions, can be compared directly with DC or small signal S-parameter measurements. This is essential if large signal RF measurements are used for the optimization of high power transistor structures and in the development of accurate non-linear CAD models