Industrial applications of cathodic-arc and RF/DC magnetron plasma

Summary form only given. Wear resistant, anti-corrosive and decorative thin films for industrial application were developed using cathodic-arc and magnetron plasmas. Carbonitride films using cathodic-arc plasma have been developed for wear-resistant applications-cutting tools and dies. Decorative ZrC/sub x/N/sub y/, and TiC/sub x/N/sub y/ films were developed for kitchen tools-bowls, spoons, knives and gas range´s outer covers. Anti-corrosive, decorative AlN and Ti(Zr)CN hard-coating techniques for cold-rolled steel plate were developed using cathodic arc and DC/RF magnetron plasmas. Wear resistant transparent diamond-like-carbon (DLC) film for eye glasses was developed using RF magnetron and modified cathodic-arc plasmas.