Title :
Characteristics of PZT films fabricated by inductively coupled plasma-assisted aerosol deposition method
Author :
Mori, M. ; Ustunomiya, T. ; Miyake, S. ; Akedo, J.
Author_Institution :
Ryukoku Univ., Shiga
Abstract :
Lead zirconate titanate (PZT) films are deposited by an inductively coupled plasma (ICP)-assisted aerosol deposition (AD) method. The influence of RF power was investigated for the deposition rate, microstructure of the films. With our experimental deposition system, the deposition rate was approximately 1 mum/min when using the AD method without plasma assist. On the other hand, the deposition rate rose to over 10 mum/min using ICP -assisted AD method with an RF power of 800 W. The cross-sectional microstructure of the film was very while using an RF power of 800 W and that without plasma assistance.
Keywords :
lead compounds; piezoceramics; plasma CVD; PZT; PZT films; RF power; cross-sectional microstructure; deposition rate; inductively coupled plasma-assisted aerosol deposition; lead zirconate titanate films; power 800 W; Aerosols; Dielectric substrates; Microstructure; Nuclear and plasma sciences; Piezoelectric films; Plasma applications; Plasma properties; Plasma temperature; Powders; Radio frequency;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393296
