• DocumentCode
    2277565
  • Title

    Analysis of Size Effect in PZT Thin Film Capacitors

  • Author

    Bouregba, R. ; Le Rhun, G. ; Poullain, G. ; Leclerc, G.

  • Author_Institution
    Lab. CRISMAT-ENSICAEN, Caen
  • fYear
    2007
  • fDate
    27-31 May 2007
  • Firstpage
    472
  • Lastpage
    475
  • Abstract
    The ferroelectric properties of Pt/PZT/Pt/TiO2/SiO2/Si thin film capacitors with different thicknesses are investigated. The degradation of the switching properties is fully reproduced by simulations including non ferroelectric space charge layers at both ferroelectric/electrode interfaces. Size effect is shown to arise from a mechanism of modulation of density and sign of the space charge.
  • Keywords
    ferroelectric switching; lead compounds; space charge; thin film capacitors; PZT; PZT thin film capacitors; ferroelectric properties; size effect; space charge layers; switching properties; Capacitors; Degradation; Dielectric thin films; Electrodes; Ferroelectric materials; Hysteresis; Permittivity; Polarization; Space charge; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
  • Conference_Location
    Nara
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-1334-8
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2007.4393302
  • Filename
    4393302
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2277565