• DocumentCode
    2277793
  • Title

    Integrated TCAD and ECAD solutions - a paradigm shift

  • Author

    Lee, Shiuh-Wuu

  • Author_Institution
    Logic Technol. Dev., Intel Corp., Santa Clara, CA, USA
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    5
  • Lastpage
    8
  • Abstract
    This paper highlights the emerging need for selective integration of physical-model based TCAD modeling and simulation tools that have been mostly applied to technology development with ECAD tools that have been traditionally used for product design. The emerging technology trends that lead to this paradigm shift are highlighted. The architecture and requirements of integrated TCAD-ECAD solutions are also discussed along with the infrastructure required to successfully meet this challenge.
  • Keywords
    integrated circuit layout; integrated circuit modelling; technology CAD (electronics); integrated TCAD-ECAD; layout-level integration; Educational institutions; Electronic design automation and methodology; Energy consumption; Frequency; Integrated circuit interconnections; Lithography; Numerical models; P-n junctions; Product design; Solid modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices, 2002. SISPAD 2002. International Conference on
  • Print_ISBN
    4-89114-027-5
  • Type

    conf

  • DOI
    10.1109/SISPAD.2002.1034504
  • Filename
    1034504