Title :
Dielectric Characteristics of PZT Films Prepared by Aerosol Deposition in Millimeter Wave Range
Author :
Nakadal, Masafumi ; Ohashi, Kazumi ; Tsuda, Hiroki ; Kawate, Etsuo ; Akedo, Jun
Author_Institution :
NEC Corp., Tsukuba
Abstract :
The dielectric properties of lead zirconate titanate [PZT, Pb(Zr0.3Ti0.7)O3] films, prepared by aerosol deposition (AD), were measured in the millimeter wave and THz range. Millimeter wave spectroscopy was applied for measurement in the frequency range from 45 to 80 GHz, and far-infrared Fourier transform measurements from 120 GHz to 20 THz was carried out. Spectroscopic data were analyzed with combination of Debye model with a distribution of Debye relaxation frequencies and harmonic oscillators. We clearly observed that the Debye relaxation took place below several tens GHz for annealed AD films. Combination of millimeter wave and THz spectroscopy was effective measurement technique for dielectric properties of ferroelectric materials at over millimeter wave range.
Keywords :
Fourier transform spectra; aerosols; annealing; dielectric relaxation; ferroelectric thin films; infrared spectra; lead compounds; liquid phase deposition; Debye relaxation frequencies; PZT; aerosol deposition; annealing; dielectric properties; far-infrared Fourier transform spectra; frequency 120 GHz to 20 THz; frequency 45 GHz to 80 GHz; harmonic oscillators; lead zirconate titanate films; millimeter wave spectroscopy; Aerosols; Data analysis; Dielectric measurements; Fourier transforms; Frequency measurement; Lead; Millimeter wave measurements; Millimeter wave technology; Spectroscopy; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393319
