Title :
Temperature Properties of PZT Actuated High-Speed Metal-Based Optical Resonant Scanners
Author :
Park, Jae-Hyuk ; Park, Youngkyu ; Akedo, Jun
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Ibaraki
Abstract :
High speed metal-based optical scanning devices were successfully fabricated in combination with piezoelectric thick films directly deposited by the aerosol deposition method (ADM) and specially designed stainless steel frame. A large optical scanning angle (41deg) was achieved at a high resonance frequency (28.24 kHz) in ambient air without vacuum packaging. The well-polished metal-based mirror has good flatness of less than 105 nm, which is lower than omega4. Sepcially, we carried out in the range from -20´C to 80´C at environmental chamber to investigate temperature properties of metal-based optical scanner. The scanning angle is linearly increased with increase of temperature, while the resonant frequency is linearly decreased as temperature increased. Also, we compared with performance of metal-based optical scanner driven by bulk PZT and AD-PZT thick films.
Keywords :
aerosols; high-speed optical techniques; lead compounds; optical scanners; piezoelectric devices; piezoelectric thin films; ADM; FeCrCJk; PZT; aerosol deposition method; ambient air; high-speed metal-based optical resonant scanners; optical scanning angle; piezoelectric thick films; resonance frequency; stainless steel; temperature -20 C to 80 C; temperature properties; Aerosols; High speed optical techniques; Optical design; Optical devices; Optical films; Piezoelectric devices; Resonance; Resonant frequency; Temperature; Thick films;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393379
