Title :
Model of n-type polycrystalline silicon thin film transistors under DC bias stress
Author :
He, Hongyu ; Zheng, Xueren
Author_Institution :
Fac. of Phys. & Optoelectron. Eng., Guangdong Univ. of Technol., Guangzhou, China
Abstract :
The density of trap states distribution in the bulk of polycrystalline silicon thin film transistor is modeled by constant deep states and exponential tail states. Pao-Sah method is used to model the hot carrier degradation behavior. At low gate voltage bias stress, tail states increase with the stress time, which indicates the generation of local strain bonds near the drain. At higher gate voltage bias states, both deep states and tail states increase with the stress time, which indicates the generation of both dangling bonds and local strain bonds near the drain. Transfer characteristic degradation with stress time is calculated. The results are agreed with the available experiment data successfully.
Keywords :
hot carriers; reliability; semiconductor thin films; silicon; thin film transistors; DC bias stress; Pao-Sah method; dangling bonds; deep states; exponential tail states; gate voltage bias stress; hot carrier degradation; local strain bonds; n-type polycrystalline silicon thin film transistors; stress time; Degradation; Hot carriers; Integrated circuit modeling; Logic gates; Silicon; Stress; Thin film transistors;
Conference_Titel :
Electronic Packaging Technology & High Density Packaging (ICEPT-HDP), 2010 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4244-8140-8
DOI :
10.1109/ICEPT.2010.5582648