DocumentCode :
2278884
Title :
A silicon cantilever beam structure for the evaluation of d31, d33 and e31 piezoelectric coefficients of PZT thin films
Author :
Herdiera, R. ; Jenkins, David ; Remiens, Denis ; Dupont, M. ; Osmont, D.
Author_Institution :
IEMN, Villeneuve-d´´Ascq
fYear :
2007
fDate :
27-31 May 2007
Firstpage :
725
Lastpage :
727
Abstract :
For optimal MEMS development it is essential to fundamentally characterise the electromechanical properties of piezoelectric thin films, such as lead zirconate titanate (PZT). A novel structure is presented to enable the piezoelectric coefficients d31, d33 and e31 to be measured for the same film, along with its Young´s modulus (Yp). By measuring displacement of a cantilever beam and its resonant frequency as a function of beam length, along with quasi-static displacement measurements, enables the coefficients to be determined.
Keywords :
Young´s modulus; beams (structures); cantilevers; lead compounds; piezoelectric thin films; piezoelectricity; silicon; MEMS; PZT; Young´s modulus; electromechanical properties; lead zirconate titanate thin films; piezoelectric coefficients; quasistatic displacement; resonant frequency; silicon cantilever beam structure; Displacement measurement; Electrodes; Laser beams; Magnetic field measurement; Optical films; Piezoelectric films; Silicon; Sputtering; Structural beams; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
ISSN :
1099-4734
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
Type :
conf
DOI :
10.1109/ISAF.2007.4393383
Filename :
4393383
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2278884
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