Title :
Fabrication and characterisation of annular thickness mode piezoelectric micro ultrasonic transducers
Author :
Dorey, R.A. ; Dauchy, F. ; Wang, D. ; Berriet, R.
Author_Institution :
Cranfield Univ., Cranfield
Abstract :
Micromachining techniques, in combination with low temperature ceramic composite sol gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUT). The processing techniques of low temperature (720degC) composite sol gel ceramic (sol + ceramic powder) deposition and wet etching will be described and device architectures demonstrated. Using these techniques, high quality PZT materials with near bulk permittivity have been obtained. The Tm-pMUT device resonated in the range of 50-100 MHz with a kt of between 0.3 and 0.4 depending on processing conditions. Examples of devices will be presented along with results of electrical and resonance measurements.
Keywords :
ceramics; etching; micromachining; permittivity; piezoelectric transducers; sol-gel processing; ultrasonic transducers; annular array thickness-mode; ceramic composite; electrical measurements; micromachining techniques; permittivity; piezoelectric microultrasonic transducers; resonance measurements; sol gel processing; temperature 720 C; wet etching; Ceramics; Fabrication; Micromachining; Permittivity; Powders; Resonance; Temperature; Ultrasonic transducer arrays; Ultrasonic transducers; Wet etching;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393385