Title :
Controlling surface discharge patterns and plasma chemistry with a hexagonal electrode structure and gas composiiton
Author :
Liang Gao ; Hongbin Ding ; Kong, Michael
Author_Institution :
Sch. of Phys. & Optoelectron. Eng., Dalian Univ. of Technol., Dalian, China
Abstract :
Summary form only given. Uniform discharge covering a large surface area is desirable for applications in materials processing and medicine. Surface discharge plasmas (SDP) is generated with a stainless steel electrode patterned with many identical hexagonal elements each having a diameter of 7mm, and is investigated from the stand point of discharge pattern and chemistry. Several gas mixtures are used made from He, Ar, N2 and O2 at atmospheric pressures and the sinusoidal plasma excitation is at 20 - 30 kHz. Electrical measurement, optical emission spectroscopy and high-speed imaging are employed to investigate the production of reactive oxygen species (ROS) and reactive nitrogen species (RNS). Intriguing discharge patterns are observed under different discharge compositions. Unique discharge patterns are observed, through altering electrical power density and gas composition. The influence on the transitions of the discharge patterns is reported and discussed of the thickness of the dielectric layer, plasma-forming gas and input electrical power density
Keywords :
argon; gas mixtures; helium; nitrogen; oxygen; plasma chemistry; plasma diagnostics; plasma materials processing; surface discharges; Ar; He; N2; O2; RNS; ROS; SDP; atmospheric pressures; dielectric layer thickness; discharge compositions; electrical measurement; frequency 20 kHz to 30 kHz; gas composiiton; gas composition; gas mixtures; hexagonal electrode structure; high-speed imaging; identical hexagonal elements; input electrical power density; material processing; medicine; optical emission spectroscopy; plasma chemistry; plasma-forming gas; pressure 1 atm; reactive nitrogen species; reactive oxygen species; sinusoidal plasma excitation; size 7 mm; stainless steel electrode; surface area; surface discharge patterns; surface discharge plasmas; uniform discharge; Discharges (electric); Educational institutions; Electrodes; Plasma chemistry; Spectroscopy; Steel; Surface discharges;
Conference_Titel :
Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS), 2014 IEEE 41st International Conference on
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-2711-1
DOI :
10.1109/PLASMA.2014.7012594
