Title :
Pure Shear Bulk Acoustic Wave of the Oriented AJN
Author :
Wu, Sean ; Lin, Zhi-Xun ; Lee, Maw-Shung ; Ro, Ruyen ; Chen, K.I.
Author_Institution :
Tung-Fang Inst. of Technol., Kaohsiung
Abstract :
Characteristics of bulk acoustic wave (BAW) propagating in (100)-, (002)-, (110)-, (200)-, (210)-and (300)-oriented AIN were investigated in this study. It was found the (002)-oriented AIN provided a pure longitudinal mode, while the (100)-, (110)-, (200)-, (210)-and (300)-oriented AIN supported a pure fast shear mode with the phase velocity 5867 m/s and the piezoelectric coupling constant (K2) 2.45 %. The (100)-, (110)-, (200)-, (210)-and (300)-oriented AIN can be employed for the design of thin film acoustic wave resonator (FBAR) liquid sensor.
Keywords :
III-V semiconductors; acoustic resonators; acoustic wave effects; aluminium compounds; bulk acoustic wave devices; permittivity; piezoelectric semiconductors; piezoelectric thin films; semiconductor thin films; AlN; BAW; FBAR; dielectric permittivity; liquid sensor; piezoelectric coupling constant; semiconductor thin films; shear bulk acoustic wave; shear mode; thin film acoustic wave resonator; Acoustic propagation; Acoustic waves; Acoustical engineering; Eigenvalues and eigenfunctions; Equations; Film bulk acoustic resonators; Matrices; Piezoelectric films; Piezoelectric materials; Thin film sensors;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393389
