Title :
Accurate Formula for Quality Factor Q of Thin Film Bulk Acoustic Resonators with Close Series and Parallel Resonance Frequencies
Author :
Chen, Pei-Yen ; Chin, Yung-Chung ; Chen, Chi-Yun ; Hou, Chun-Li
Author_Institution :
Chung-Shan Inst. of Sci. & Technol., Taoyuan
Abstract :
This paper presents improved formula accuracy for quality factor Q of thin film bulk acoustic resonators (FBARs) with close series and parallel resonance frequencies. Traditionally, the series and parallel resonance behaviors are treated independently. The FBAR piezoelectric coupling coefficient is only a few percentages with the series and parallel frequencies close enough to influence each other. The FBARs with two-port configuration are fabricated using silicon bulk micro-machining technology. Including the FBAR transmission lines are analyzed to probe their characteristics using a network analyzer. The signal power loss of the transmission lines is modeled to characterize the FBARs using two-port S parameter measurement data.
Keywords :
Q-factor; S-parameters; acoustic resonators; bulk acoustic wave devices; elemental semiconductors; micromachining; micromechanical resonators; piezoelectric devices; silicon; thin film devices; two-port networks; FBAR piezoelectric coupling coefficient; Si; network analyzer; parallel resonance frequency; quality factor; series resonance frequency; signal power loss; silicon bulk micro-machining technology; thin film bulk acoustic resonators; transmission lines; two-port S parameter measurement data; two-port configuration; Couplings; Film bulk acoustic resonators; Piezoelectric films; Power transmission lines; Probes; Q factor; Resonance; Resonant frequency; Silicon; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393393
