Characteristics of tube-type piezoelectric motor fabricated by aerosol deposition

Author

Yoon, W.H. ; Hahn, B.D. ; Ryu, J.H. ; Choi, J.J. ; Park, D.S. ; Choi, H.O.

Author_Institution

Korea Inst. of Machinery & Mater., Changwon

fYear

2007

fDate

27-31 May 2007

Firstpage

777

Lastpage

778

Abstract

Tube-type piezoelectric motor having a volume of 2times2times10 mm³ was fabricated by aerosol deposition of PZT powder on the square-shaped titanium alloy tube. With applying two channels driving voltage the stator generates two orthogonal bending vibration modes which makes wobbling motion of the stator at the resonance frequency. At the frequency of 76.4 kHz with 60 V_pp, rotation speed of the stator was about 1900 rpm and the speed of the stator was increased linearly with applying voltage.

Keywords

aerosols; lead compounds; piezoelectric motors; powders; stators; titanium; PZT powder; PZT-Ti; aerosol deposition; channel driving voltage; frequency 76.4 kHz; orthogonal bending vibration modes; resonance frequency; rotation speed; square-shaped titanium alloy tube; stator; tube-type piezoelectric motor; voltage 60 V; wobbling motion; Aerosols; Optical films; Optical sensors; Piezoelectric materials; Resonance; Resonant frequency; Rotation measurement; Stators; Velocity measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Conference_Location

Nara

ISSN

1099-4734

Print_ISBN

978-1-4244-1334-8

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2007.4393399

Filename

4393399