Title :
Asymmetry in effective-channel length of n- and p-MOSFETs
Author :
Logan, R. ; Yuan Taur ; Crabbe, Edward
Author_Institution :
Semicond. Res. & Dev. Center, IBM Corp., Hopewell Junction, NY, USA
Abstract :
We have shown that there is a fundamental asymmetry in the effective-channel lengths of n-FET and p-FET devices. Basic differences in electron and hole transport give rise to a larger effective channel length for n-FETs. This can also be observed through a comparison of the device sheet resistance where the relative difference in channel to source/drain mobility leads to distinct sheet rho patterns near the metallurgical junction. Recent investigations in current flow patterns in the source/drain regions (to be reported elsewhere) has further substantiated these findings.
Keywords :
MOSFET; asymmetry; effective channel length; electron transport; hole transport; metallurgical junction; mobility; n-MOSFET; p-MOSFET; rho pattern; sheet resistance; Boron; CMOS process; CMOS technology; Capacitance; Charge carrier processes; Contacts; Doping; MOSFET circuits; Manufacturing processes; Research and development;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 1997. SISPAD '97., 1997 International Conference on
Conference_Location :
Cambridge, MA, USA
Print_ISBN :
0-7803-3775-1
DOI :
10.1109/SISPAD.1997.621326