• DocumentCode
    2279174
  • Title

    Asymmetry in effective-channel length of n- and p-MOSFETs

  • Author

    Logan, R. ; Yuan Taur ; Crabbe, Edward

  • Author_Institution
    Semicond. Res. & Dev. Center, IBM Corp., Hopewell Junction, NY, USA
  • fYear
    1997
  • fDate
    8-10 Sept. 1997
  • Firstpage
    21
  • Lastpage
    24
  • Abstract
    We have shown that there is a fundamental asymmetry in the effective-channel lengths of n-FET and p-FET devices. Basic differences in electron and hole transport give rise to a larger effective channel length for n-FETs. This can also be observed through a comparison of the device sheet resistance where the relative difference in channel to source/drain mobility leads to distinct sheet rho patterns near the metallurgical junction. Recent investigations in current flow patterns in the source/drain regions (to be reported elsewhere) has further substantiated these findings.
  • Keywords
    MOSFET; asymmetry; effective channel length; electron transport; hole transport; metallurgical junction; mobility; n-MOSFET; p-MOSFET; rho pattern; sheet resistance; Boron; CMOS process; CMOS technology; Capacitance; Charge carrier processes; Contacts; Doping; MOSFET circuits; Manufacturing processes; Research and development;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Simulation of Semiconductor Processes and Devices, 1997. SISPAD '97., 1997 International Conference on
  • Conference_Location
    Cambridge, MA, USA
  • Print_ISBN
    0-7803-3775-1
  • Type

    conf

  • DOI
    10.1109/SISPAD.1997.621326
  • Filename
    621326