A high density capacitive pressure sensor array for fingerprint sensor application

Author

Rey, P. ; Charvet, P. ; Delaye, M.T. ; Hassan, S. Abou

Author_Institution

LETI-CEA, Grenoble, France

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1453

Abstract

This paper reports on the first technological and electrical results on the sensitive part of a fingerprint sensor which consists of an X-Y array of absolute pressure capacitive sensitive cells with a pitch of 50 μm. Manufacturing is carried out using a specific CMOS compatible silicon surface micromachining process. Very good cell sensitivity homogeneity has been measured at a wafer level thanks to an automatic probe test. Pressure sensor geometrical parameters and membrane material Young modulus have been deduced from tests on individual cells. Results are in good agreement with theory and have been confirmed by deflexion interferometric measurements

Keywords

automatic testing; electric sensing devices; fingerprint identification; micromachining; microsensors; pressure sensors; 50 micron; X-Y array; Young modulus; automatic probe test; capacitive pressure sensor array; cell sensitivity homogeneity; deflexion interferometric measurements; fingerprint sensor; geometrical parameters; membrane material; surface micromachining process; Automatic testing; CMOS process; CMOS technology; Capacitive sensors; Fingerprint recognition; Manufacturing processes; Micromachining; Probes; Sensor arrays; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635738

Filename

635738