• DocumentCode
    2279287
  • Title

    Silicon lattice-parameter measurements with centimeter x-ray interferometry

  • Author

    Ferroglio, Luca ; Mana, Giovanni ; Massa, Enrico

  • Author_Institution
    INRiM-Ist. Naz. di Ricerca Metrologica, Turin
  • fYear
    2008
  • fDate
    8-13 June 2008
  • Firstpage
    410
  • Lastpage
    411
  • Abstract
    A combined x-ray and optical interferometer capable of centimeter displacements has been realized to measure the lattice parameter of a 28Si crystal to within a 3 x 10-9 relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the new apparatus.
  • Keywords
    elemental semiconductors; interferometry; lattice constants; light interferometers; silicon; 28Si; centimeter X-ray interferometry; centimeter displacement; optical interferometer; silicon lattice-parameter; Adaptive optics; Crystals; Displacement measurement; Interference; Lattices; Optical feedback; Optical interferometry; Optical sensors; Prototypes; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements Digest, 2008. CPEM 2008. Conference on
  • Conference_Location
    Broomfield, CO
  • Print_ISBN
    978-1-4244-2399-6
  • Electronic_ISBN
    978-1-4244-2400-9
  • Type

    conf

  • DOI
    10.1109/CPEM.2008.4574827
  • Filename
    4574827
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2279287