Characterization of low temperature processing and high density integrated capacitor on organic substrate

Rapidly growing performance and mixed-signal integration is driving the need for product and component miniaturization in electronics applications. Integral passive technology is a potentially attractive solution to replace discrete passives. Capacitors are widely used for broad range of applications including filtering, tuning and power-bus decoupling. This paper presents the performance characterization of low temperature process which is compatible with organic substrates. RF characterization up to 10 GHz was performed to extract the impedance profile, effective capacitance and capacitance density parameters. The capacitors were also characterized under different temperature from 25degC to 150degC.