Title :
Optical Characteristics of a PZT Waveguide Fabricated Using Aerosol Deposition for Optical Modulators on LSI Chips
Author :
Shimizu, T. ; Nakada, M. ; Tsuda, H. ; Akedo, J. ; Nishi, K. ; Ohashi, K.
Author_Institution :
MIRAI-Selete, Ibaraki
Abstract :
We developed a lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), optical waveguide fabricated using aerosol deposition (AD). The device´s optical transmission loss of about 4 dB/mm is comparable with that of AD film. The PZT optical waveguide can meet the requirements of optical modulators for low optical loss.
Keywords :
aerosols; electro-optical modulation; integrated optics; large scale integration; lead compounds; optical films; optical losses; optical waveguides; piezoelectric devices; LSI chips; PZT; PZT waveguide; aerosol deposition; electro-optic modulators; integrated circuits; optical characteristics; optical modulators; optical transmission loss; Aerosols; Large scale integration; Lead; Optical devices; Optical films; Optical losses; Optical modulation; Optical waveguides; Propagation losses; Titanium compounds;
Conference_Titel :
Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
Conference_Location :
Nara
Print_ISBN :
978-1-4244-1334-8
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2007.4393418
