An innovative Pirani pressure sensor

Author

Chou, Bruce C S ; Shie, Jin-Shown

Author_Institution

Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1465

Abstract

A conventional Pirani vacuum sensor is converted into a device able to measure high gas pressure. By referring to infinite pressure, heat-loss change from the reference to a measured pressure induces electrical signal on the resistive sensor. 0.3 μm shallow gap is formed for the floating microsensors to increase its sensitivity. This results in a measurable range from 10⁵ down to 10^-1 Torr. The thermal microsensor differs from the piezoresistive or capacitive type in sensing mechanisms. It also has advantages in smaller size and simpler structure

Keywords

electric sensing devices; elemental semiconductors; high-pressure techniques; membranes; microsensors; pressure sensors; silicon; vacuum measurement; 0.3 mum; 10E5 to 10E-1 torr; Pirani pressure sensor; Si; capacitive sensing; electrical signal; floating microsensors; gas pressure; heat-loss change; piezoresistive sensing; resistive sensor; sensitivity; shallow gap; thermal microsensor; Atmospheric measurements; Biomembranes; Electric variables measurement; Gas detectors; Microsensors; Pressure measurement; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635741

Filename

635741