Title :
A fiber-optic pressure microsensor for biomedical applications
Author :
Tohyama, O. ; Kohashi, M. ; Fukui, M. ; Itoh, H.
Author_Institution :
Mitsubishi Cable Ind. Ltd., Hyogo, Japan
Abstract :
A fiber-optic pressure microsensor with a sensing element only 270×270×150 μm in size has been developed and applied to actual balloon catheters. The sensing principle is based on the detection of optical reflection intensity changes from a diaphragm located in front of an optical fiber. The sensors have been fabricated using silicon micromaching such as anisotropic etching and direct wafer bonding. For the transmitting source and signal light, a multimode optical fiber 50/125 μm (core/clad) in diameter is used. This paper describes the miniaturization of the sensing element through an improved design and the use of thinner silicon wafers, and application of the pressure microsensor to actual balloon catheters 1.5 mm in outer diameter
Keywords :
biomedical equipment; elemental semiconductors; fibre optic sensors; microsensors; pressure sensors; silicon; surgery; 150 mum; 270 mum; Si; Si micromaching; Si wafers; anisotropic etching; balloon catheters; biomedical applications; direct wafer bonding; fiber-optic pressure microsensor; miniaturization; multimode optical fiber; optical reflection intensity; pressure microsensor; Anisotropic magnetoresistance; Biosensors; Catheters; Etching; Microsensors; Optical detectors; Optical fiber sensors; Optical fibers; Optical reflection; Silicon;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635747
