Bulk micromachined vacuum sensor

Author

Gutierrez, Roman C. ; Tang, Tony K. ; Stell, Christopher B. ; Vorperian, Vatche ; Shcheglov, Kirill

Author_Institution

MicroDevices Lab., California Inst. of Technol., Pasadena, CA, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1497

Abstract

In this paper, we present recent work on the fabrication and testing of a silicon bulk micromachined vacuum sensor. The fabrication process, electronics, and various modes of operation are described. The pressure sensitivity is demonstrated between 10^-6 Torr and 10 ^-1 Torr by “calibrating” against a thermocouple gauge, a capacitance manometer, a spinning rotor gauge, and a hot cathode ionization gauge. For the preferred mode of operation, the frequency dependence on temperature is 0.007 Hz/°C, the device is vibration insensitive, and has a measured intrinsic Q-factor above 100,000

Keywords

Q-factor; calibration; elemental semiconductors; micromachining; microsensors; semiconductor device testing; silicon; vacuum gauges; vacuum measurement; 1E-1 to 1E-6 torr; Si; bulk micromachined vacuum sensor; fabrication process; intrinsic Q-factor; pressure sensitivity; testing; vibration insensitive device; Capacitance; Cathodes; Fabrication; Frequency dependence; Ionization; Silicon; Spinning; Temperature dependence; Testing; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635749

Filename

635749