Title :
Micromachined thin-film multijunction thermal converters developed at KRISS
Author :
Park, S.I. ; Kwon, S.W. ; Kim, K.J. ; Woo, B.C. ; Lee, Y.H.
Author_Institution :
Electron. Devices Group, Korea Stand. Res. Inst., Taejon, South Korea
Abstract :
Micromachined thin-film multijunction thermal converters (MJTCs) suitable as high performance ac-dc transfer standards have been fabricated and studied at KRISS. This paper describes their thermal design and the materials chosen to improve performance. And finally performance data are given over a wide range of frequencies and conditions.
Keywords :
heat sinks; thermoelectric devices; transfer standards; voltage measurement; KRISS; ac-dc transfer standards; micromachined converters; performance data; thermal design; thin-film multijunction thermal converters; Analog-digital conversion; Frequency; Semiconductor materials; Semiconductor thin films; Sputtering; Temperature; Thermal conductivity; Thin film devices; Transistors; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements, 2002. Conference Digest 2002 Conference on
Conference_Location :
Ottawa, Ontario, Canada
Print_ISBN :
0-7803-7242-5
DOI :
10.1109/CPEM.2002.1034705
