Title :
Density measurement of a small 28Si single crystal
Author :
Waseda, A. ; Fujii, K.
Author_Institution :
Nat. Metrol. Inst. of Japan, AIST, Tsukuba, Japan
Abstract :
The density of an isotopically enriched 28Si crystal is evaluated. A transfer standard of the hollow silicon cylinder is prepared and its density is determined by the hydrostatic weighing (HW). The 28Si crystal is then compared with the hollow silicon for the determination of the density by the pressure-of-flotation (PF) measurement.
Keywords :
density measurement; elemental semiconductors; silicon; transfer standards; weighing; Si; density measurement; hollow silicon cylinder; hydrostatic weighing; isotopically enriched crystal; pressure-of-flotation measurement; small 28Si single crystal; transfer standard; Bonding; Crystalline materials; Crystals; Density measurement; Gold; Lattices; Measurement standards; Metrology; Silicon; Solids;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 2008. CPEM 2008. Conference on
Conference_Location :
Broomfield, CO
Print_ISBN :
978-1-4244-2399-6
Electronic_ISBN :
978-1-4244-2400-9
DOI :
10.1109/CPEM.2008.4574955
