Evaluating solar microsensors packaged with MEMS covers for improving light tracking efficiency

A novel solar microsensor with microelectromechanical system (MEMS)-based packaging for improving solar tracking efficiency was proposed and a functional solar power sensing array was also developed. Solar energy as a renewable energy source in the world is the most important issue. The microsensor with different shapes of masks as light inlet was fabricated on silicon wafers to provide variable attenuation effect of the sunlight. To detect light incident elevation and azimuth accurately, a circuit module for a maximum power tracking system is developed conducting the automatic tracking function by feedback control technique. The best angle related sensitivity for the microsensors covered with inside-shrunk and inside-extended windows are 128.6 Ω/degree and 150.2 Ω/degree, respectively. The collimated process of the incident solar power by developed solar microsensor keeps maximum solar energy collection with the best long-term efficiency in photovoltaic energy conversion. The microsensor to sense collimated solar intensity is designed to promote solar energy collection efficiency and an intelligent bi-axes dynamic solar tracking device will develop in the future.