DocumentCode :
2281626
Title :
Fabrication and hydrogen sensing properties of doped titania nanotubes
Author :
Qin, Rui ; Ding, Dongyan ; Ning, Congqin ; Liu, Hegang ; Li, Ming ; Mao, Dali
Author_Institution :
Lab. of Microelectron. Mater. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
fYear :
2010
fDate :
16-19 Aug. 2010
Firstpage :
1327
Lastpage :
1330
Abstract :
Titania nanotubes have been widely used in gas sensing applications such as hydrogen sensors. Doping titania nanotubes with other elements are expected to provide tunable band-gap and thus favorable hydrogen sensing properties. In this work, Nb, Zr-doped titania nanotube arrays in crystallized states were fabricated on alloy substrates through anodization and heat-treatment. And doped nanotube sensors were assembled on PCB. Corresponding anodization and sensor fabrication processes were investigated and hydrogen sensing properties of the nanotube sensors were tested in hydrogen atmosphere. Experimental results indicated that the content of Zr had a great impact on the growth, thermal stability and hydrogen sensing property of regular nanotube arrays. The Nb-doped nanotubes demonstrated a good hydrogen sensing performance.
Keywords :
anodisation; doping; energy gap; gas sensors; heat treatment; nanosensors; nanotubes; titanium compounds; PCB; TiO2:Nb,Zr; anodization; doped titania nanotube; gas sensing application; heat-treatment; hydrogen sensing properties; sensor fabrication; titania nanotube array; tunable band-gap; Metals; Nanotubes; Sensors; Substrates; Surface morphology; Thermal stability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Packaging Technology & High Density Packaging (ICEPT-HDP), 2010 11th International Conference on
Conference_Location :
Xi´an
Print_ISBN :
978-1-4244-8140-8
Type :
conf
DOI :
10.1109/ICEPT.2010.5582803
Filename :
5582803
Link To Document :
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