A multi-level Newton method for static and fundamental frequency analysis of electromechanical systems

Author

Aluru, N.R. ; White, J.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA

fYear

1997

fDate

8-10 Sept. 1997

Firstpage

125

Lastpage

128

Abstract

A matrix-implicit multi-level Newton method for black-box self-consistent analysis of 3-D microelectromechanical systems (MEMS) is described. The approach is shown to converge very rapidly and is much faster than relaxation algorithm for tightly coupled problems. In addition, the matrix-implicit approach is used to derive a computationally efficient technique to extract the fundamental frequency as a function of applied voltage for a microstructure. While this paper focuses on coupled electromechanical analysis, the proposed algorithm can be extended to include several coupled domains encountered in MEMS.

Keywords

Newton method; convergence of numerical methods; electronic engineering computing; matrix algebra; micromechanical devices; simulation; 3D MEMS; 3D microelectromechanical systems; black-box self-consistent analysis; computationally efficient technique; coupled electromechanical analysis; fundamental frequency analysis; matrix-implicit method; multi-level Newton method; static frequency analysis; Acceleration; Algorithm design and analysis; Conductors; Contracts; Couplings; Electrostatics; Frequency; Micromechanical devices; Newton method; Nonlinear equations;

fLanguage

English

Publisher

ieee

Conference_Titel

Simulation of Semiconductor Processes and Devices, 1997. SISPAD '97., 1997 International Conference on

Conference_Location

Cambridge, MA, USA

Print_ISBN

0-7803-3775-1

Type

conf

DOI

10.1109/SISPAD.1997.621352

Filename

621352