Title :
A multi-level Newton method for static and fundamental frequency analysis of electromechanical systems
Author :
Aluru, N.R. ; White, J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
A matrix-implicit multi-level Newton method for black-box self-consistent analysis of 3-D microelectromechanical systems (MEMS) is described. The approach is shown to converge very rapidly and is much faster than relaxation algorithm for tightly coupled problems. In addition, the matrix-implicit approach is used to derive a computationally efficient technique to extract the fundamental frequency as a function of applied voltage for a microstructure. While this paper focuses on coupled electromechanical analysis, the proposed algorithm can be extended to include several coupled domains encountered in MEMS.
Keywords :
Newton method; convergence of numerical methods; electronic engineering computing; matrix algebra; micromechanical devices; simulation; 3D MEMS; 3D microelectromechanical systems; black-box self-consistent analysis; computationally efficient technique; coupled electromechanical analysis; fundamental frequency analysis; matrix-implicit method; multi-level Newton method; static frequency analysis; Acceleration; Algorithm design and analysis; Conductors; Contracts; Couplings; Electrostatics; Frequency; Micromechanical devices; Newton method; Nonlinear equations;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 1997. SISPAD '97., 1997 International Conference on
Conference_Location :
Cambridge, MA, USA
Print_ISBN :
0-7803-3775-1
DOI :
10.1109/SISPAD.1997.621352
