Methodology for predictive calibration of TCAD simulators

This paper presents an original methodology for calibrating Technology Computer-Aided Design (TCAD) simulators. This approach associates physical analysis of models, statistical analysis of data, and systematic use of Design of Experiments. This new concept, inspired by the Taguchi´s methodology, allows to minimise the difference between simulations and measurements while being the less sensitive to the fluctuations of the manufacturing process. The methodology fits well with economic constraints by only using the existing data, and by reusing previous calibration works.