Title :
SOME SELECTED RESEARCH ITEMS OF THE MICROMECHANICS DEPARTMENT AT MESA
Keywords :
Actuators; Capacitive sensors; Chemical technology; Fluid flow; Force measurement; Integrated circuit technology; Micromachining; Optical sensors; Resonance; Silicon;
Conference_Titel :
Micro Machine and Human Science, 1994. Proceedings., 1994 5th International Symposium on
Print_ISBN :
0-7803-2095-6
DOI :
10.1109/ISMMHS.1994.512894
