Title :
Monolithic micromanipulator with flexure hinges
Author :
Yihui, Wu ; Xiaodong, Tong ; Liding, Wang
Abstract :
A finite element method (FEM) was applied to determine critical parameters in the hinges based on the needed natural frequency of the micromanipulator. In order to explain the design method for high rigidity and high resolution of it, the relationship between the motor space and the motion space was analyzed also using screw theory in this paper
Keywords :
Design methodology; Fasteners; Finite element methods; Frequency; Kinematics; Marine vehicles; Micromanipulators; Motion analysis; Semiconductor device manufacture; Stress;
Conference_Titel :
Micro Machine and Human Science, 1994. Proceedings., 1994 5th International Symposium on
Conference_Location :
Nagoya, Japan
Print_ISBN :
0-7803-2095-6
DOI :
10.1109/ISMMHS.1994.512909
