DocumentCode
2283213
Title
Analysis of lattice-strain effects in LLL X-ray interferometers by Takagi equations
Author
Mana, G. ; Palmisano, C. ; Zosi, G.
Author_Institution
Ist. di Metrologia G. Colonnetti, CNR, Torino, Italy
fYear
2002
fDate
16-21 June 2002
Firstpage
292
Lastpage
293
Abstract
The Takagi approach has been used to study whether the determination of the Si lattice parameter a/sub o/, with 10/sup -9/ relative uncertainty, is affected by lattice strains of various kind.
Keywords
X-ray crystallography; X-ray diffraction; electromagnetic wave interferometry; elemental semiconductors; lattice constants; silicon; LLL X-ray interferometers; Si; Si lattice parameter; Takagi equations; X-ray propagation; lattice-strain effects; Atomic measurements; Capacitive sensors; Equations; Interferometers; Lattices; Measurement uncertainty; Samarium; Shape; Silicon; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements, 2002. Conference Digest 2002 Conference on
Conference_Location
Ottawa, Ontario, Canada
Print_ISBN
0-7803-7242-5
Type
conf
DOI
10.1109/CPEM.2002.1034836
Filename
1034836
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