Ultimate Scaling Projection of Cylindrical 3D SONOS Devices

We present a thorough investigation of scalability perspectives of 3D SONOS devices through simulations calibrated on cylindrical test structures. We identify the key technological challenge limiting the scalability of this solution and found that, even with the present limitations, 3D SONOS arrays could achieve bit density 3-4 generations ahead of the current planar Floating-Gate technology. Moreover, because of the more demanding constraints, MLC operations will not provide clear benefits over SLC in this technology.