• DocumentCode
    2283908
  • Title

    Nanowire-based 2-D and 3-D XoY electronics

  • Author

    Kapadia, Rehan ; Takei, Kuniharu ; Takahashi, Toshitake ; Ruebusch, Daniel ; Javey, Ali

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Univ. of California at Berkeley, Berkeley, CA, USA
  • fYear
    2010
  • fDate
    17-20 Aug. 2010
  • Firstpage
    37
  • Lastpage
    40
  • Abstract
    The authors discuss the 3-D and 2-D X-on-Y (XoY) assembly techniques, utilizing specific examples to illustrate the potential of these methods for the fabrication of high performance devices on arbitrary substrates. For fabrication of 3-D structures, a templated nanomaterial growth technique is used. Specifically, anodic aluminum oxide (AAO) is used as the growth template. Alternatively, for 2-D assembly, a nanomaterial transfer process is used, where the nanostructures are first grown on a convenient growth substrate, and then deterministically placed on a substrate of choice using photolithography in conjunction with a printing process. 2-D and 3-D XoY assembly and integration of nanostructured materials are demonstrated for electronics, sensing, and energy applications. The presented devices illustrate the versatility and potential of XoY techniques for the fabrication of a large array of high performance devices on flexible and low-cost substrates.
  • Keywords
    aluminium compounds; flexible electronics; integrated circuit technology; nanoelectronics; nanofabrication; nanolithography; nanowires; semiconductor materials; semiconductor quantum wires; substrates; 2D assembly technique; 2D integration; 3D XoY electronics; 3D assembly technique; 3D integration; 3D structures; AlO; anodic aluminum oxide; growth template; low-cost flexible substrate; nanomaterial transfer process; nanowire-based 2D XoY electronics; photolithography; printing process; single crystalline semiconductor materials; templated nanomaterial growth;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
  • Conference_Location
    Seoul
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4244-7033-4
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2010.5697725
  • Filename
    5697725