Global modeling and PIC simulation of low-temperature plasma discharges

Summary form only given, as follows. A global model which includes the time-dependent evolution of spatially averaged plasma parameters is used for studying several different types of low-temperature plasma discharges such as the pseudospark discharge and the inductively coupled plasma discharges. The pulse effect of the applied power source to plasma including secondary electron emission and recombination is extensively investigated. These characteristics are compared (whenever possible) with those from particle-in-cell simulations with Monte-Carlo collisions, which are also used for examining in detail the Paschen breakdown and self-oscillation (with period doubling) properties of a capacitively coupled discharge.