• DocumentCode
    2284868
  • Title

    Improvement of morphology, structure, and optical properties of GaAs nanowires grown on Si substrates

  • Author

    Kang, Jung-Hyun ; Gao, Qiang ; Joyce, Hannah J. ; Tan, Hark Hoe ; Jagadish, Chennupati ; Kim, Yong ; Guo, Yanan ; Xu, Hongyi ; Zou, Jin ; Fickenscher, Melodie A. ; Smith, Leigh M. ; Jackson, Howard E. ; Yarrison-Rice, Jan M.

  • Author_Institution
    Dept. of Electron. Mater. Eng., Australian Nat. Univ., Canberra, ACT, Australia
  • fYear
    2010
  • fDate
    17-20 Aug. 2010
  • Firstpage
    470
  • Lastpage
    473
  • Abstract
    We investigate vertical and defect-free growth of GaAs nanowires on Si (111) substrates via a vapor-liquid-solid (VLS) growth mechanism with Au catalysts by metal-organic chemical vapor deposition (MOCVD). By using annealed thin GaAs buffer layers on the surface of Si substrates, most nanowires are grown on the substrates straight, following (111) direction; by using two temperature growth, the nanowires were grown free from structural defects, such as twin defects and stacking faults. Systematic experiments about buffer layers indicate that V/III ratio of precursor and growth temperature can affect the morphology and quality of the buffer layers. Especially, hetero-structural buffer layers grown with different V/III ratios and temperatures and in-situ post-annealing step are very helpful to grow well arranged, vertical GaAs nanowires on Si substrates. The initial nanowires having some structural defects can be defect-free by two-temperature growth mode with improved optical property, which shows us positive possibility for optoelectronic device application.
  • Keywords
    III-V semiconductors; annealing; buffer layers; chemical vapour deposition; gallium arsenide; nanofabrication; nanowires; semiconductor growth; semiconductor quantum wires; stacking faults; GaAs; MOCVD; Si; Si (111) substrates; V-III ratios; annealed thin buffer layers; defect-free growth; growth temperature; in-situ post-annealing step; metal-organic chemical vapor deposition; morphology; nanowires; optical properties; stacking faults; structure properties; twin defects; two-temperature growth mode; vapor-liquid-solid growth; vertical growth; Defect-free; Epitaxial Growth; GaAs; MOCVD; Nanowire; Si substrate;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
  • Conference_Location
    Seoul
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4244-7033-4
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2010.5697783
  • Filename
    5697783