A 15 b electromechanical sigma-delta converter for acceleration measurements

Author

Smith, T. ; Nys, O. ; Chevroulet, M. ; DeCoulon, Y. ; Degrauwe, M.

Author_Institution

Swiss Center for Electron. & Microtechnol. Inc., Neuchatel, Switzerland

fYear

1994

fDate

16-18 Feb. 1994

Firstpage

160

Lastpage

161

Abstract

Precision accelerometers for applications such as inertial navigation and guidance, tilt measurement and low-level vibration monitoring can be characterized by shown specifications . Drawbacks of classical electromagnetic servo-accelerometers (fabrication cost, power consumption and shock resistance) are overcome by using a bulk micromachined capacitive accelerometer and a CMOS interface circuit.<>

Keywords

CMOS integrated circuits; acceleration measurement; accelerometers; analogue-digital conversion; delta modulation; electromechanical effects; inertial navigation; vibration measurement; CMOS interface circuit; acceleration measurements; bulk micromachined capacitive accelerometer; electromagnetic servo-accelerometers; electromechanical sigma-delta converter; fabrication cost; guidance; inertial navigation; low-level vibration monitoring; power consumption; precision accelerometers; shock resistance; tilt measurement; Acceleration; Accelerometers; Costs; Delta-sigma modulation; Electrical resistance measurement; Electromagnetic measurements; Fabrication; Inertial navigation; Monitoring; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 1994. Digest of Technical Papers. 41st ISSCC., 1994 IEEE International

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-1844-7

Type

conf

DOI

10.1109/ISSCC.1994.344687

Filename

344687