Analysis of Nonlinearities in Force-to-Voltage Conversion in Vibratory Microgyroscope

Author

Niu, Shaohua ; Gao, Shiqiao

Author_Institution

Sch. of Mechatronical Eng., Beijing Inst. of Technol., Beijing, China

Volume

1

fYear

2010

fDate

13-14 March 2010

Firstpage

551

Lastpage

554

Abstract

At present, the MEMS vibratory gyroscope is an extensively researched MEMS sensor. The vibratory gyroscope is used to measure the angular velocity of object, which is based on Coriolis effect. According to the working principle of this kind of gyroscope, the force to voltage is an important part conversion for realizing the role of the gyro. In the paper, we analyze the nonlinearities in force-to-voltage conversion, and conclude that the mechanical quadrature signal can form the limiting factor for the overall accuracy of the system.

Keywords

angular velocity measurement; gyroscopes; microsensors; vibrations; Coriolis effect; MEMS sensor; MEMS vibratory gyroscope; angular velocity; force-to-voltage conversion; mechanical quadrature signal; microgyroscope nonlinearities; vibratory microgyroscope; Angular velocity; Circuits; Drives; Force control; Force measurement; Gyroscopes; Micromechanical devices; Rotation measurement; Velocity measurement; Vibration measurement; MEMS; force-to-voltage conversion; mechanical quadrature; nonlinearities; synchronous demodulation; vibratory microgyroscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2010 International Conference on

Conference_Location

Changsha City

Print_ISBN

978-1-4244-5001-5

Electronic_ISBN

978-1-4244-5739-7

Type

conf

DOI

10.1109/ICMTMA.2010.59

Filename

5459027