Investigation of time-integration and iterative techniques for nonequilibrium phosphorus diffusion modeling

We investigate numerical integration and iterative solution strategies for a class of reaction-diffusion systems used for modeling nonequilibrium phosphorus diffusion in silicon. These problems typically yield stiff systems of equations, and their efficient numerical simulation requires the use of stable integration strategies along with fast, robust algebraic system solvers. We compare the numerical performance of semi-implicit Runge-Kutta methods in conjunction with several standard nonsymmetric iterative solvers and multigrid methods.